Multi Parameter Mass Flowmeter

FMA6600 and FMA6700 Series

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Multi-Drop Capability of Up to 256 Units (for RS-485 Option)
Stores Calibration Data for Up to 10 Different Gases
Supports 10 Different Engineering Units Including User Defined
Programmable 12 Digits Totalizer Indicates Total Gas Volume
Flow Alarm Limits for High and Low Gas Flow with Relay Output
Pressure Alarm (FMA6700) Limits for High and Low Gas Pressure with Relay Output
Temperature Alarm (FMA6700) Limits for High and Low Gas Temperature with Relay Output
Digital (RS-232 or RS-485) and Analog Outputs Operate Simultaneously
Internal Conversion Factors for Up to 32 Gases

Electronic Mass Flow Meters & Controllers - View related products

Description

Interface
All features of the FMA6600 and FMA6700 Series flow meters can be accessed via the local four button keypad and LCD. The digital interface operates via RS485 (optional RS-232 available) and provides access to applicable internal data including: flow, temperature, pressure reading, auto zero, totalizer and alarms settings, gas table, conversion factors and engineering units selection, dynamic response compensation and linearization table adjustment. The analog interface provides 0 to 5 Vdc or 0 to 10 Vdc or 4 to 20 mA outputs for flow, pressure and temperature (jumper selectable).
Auto Zero
The FMA6600 and FMA6700 Series supports automatic sensor zero offset adjustment that can be activated locally via keypad or remotely via digital interface. The auto zero feature requires absolutely no flow through the meter during auto zero process. Provisions are made to either start, stop or save the current auto zero value via digital commands.
Totalizer
The total volume of the gas is calculated by integrating the actual gas flow rate with respect to time. Both keypad menu and digital interface commands are provided to: • set the totalizer to ZERO • start the totalizer at a preset flow • assign action at a preset total volume • start/stop totalizing the flow • read totalizer Totalizer conditions become true, when the totalizer reading and the "Stop at Total" volumes are equal.
Flow Alarm
High and Low gas flow ALARM limits can be preprogrammed via keypad or remotely via digital interface. ALARM conditions become true when the current flow reading is equal or higher/lower than corresponding values of high and low alarm levels. Alarm action can be assigned with preset delay interval (0-3600 seconds) to activate the contact closer (separate for High and Low alarm). Pressure Alarm (FMA6700 Series) High and Low gas pressure ALARM limits can be preprogrammed via keypad or remotely via digital interface. Pressure alarm conditions become true when the current pressure reading is equal or higher than corresponding values of high pressure alarm settings or equal or lower than corresponding values of low pressure alarm settings. Alarm action can be assigned to activate the contact closer (separate for High and Low pressure alarm). Temperature Alarm (FMA6700 Series) High and Low gas temperature ALARM limits can be preprogrammed via keypad or remotely via digital interface. Temperature alarm conditions become true when the current temperature reading is equal or higher than corresponding values of high temperature alarm settings or equal or lower than corresponding values of low temperature alarm settings. Alarm action can be assigned to activate the contact closer (separate for High and Low temperature alarm).
Engineering Units
The flow set points, measured gas flow and associated totalizer data are scaled directly in engineering units via the front panel keypad or digital interface. The following units of measure are supported: %F.S., L/min, L/h, mL/min, mL/h, SCFH, SCFM, LbPH, LbPM, User Defined EU.
Multi-Gas Calibration
The FMA6600 Series is capable of storing primary calibration data for up to 10 gases. This feature allows the same FMA6600 Series to be calibrated for multiple gases while maintaining the rated accuracy on each.
Standard 10-Point NIST Calibration
Optional up to 9 additional 10-point calibration may be ordered at an additional charge per gas.
Conversion Factors
Conversion factors for up to 32 gases are stored in the FMA6600 and FMA 6700 Series. In addition, the provision is made for a user defined conversion factor. Conversion factors may be applied to any of the ten gas calibrations via keypad or digital interface commands.
Contact Closure
Two sets of dry contact relay outputs are provided to actuate user supplied equipment. These are programmable via local keypad or digital interface such that the relays can be made to switch when a specified event occurs (e.g. when a low or high flow, pressure or temperature alarm limit is exceeded or when the totalizer reaches a specified value).
Leak Integrity
1 x 10^-9 sccs of Helium maximum to the outside environment.

FMA6600/FMA6700 Transducers should not be used for monitoring Oxygen gas unless specifically cleaned and prepared for such application. See below for ordering details.

SPECIFICATIONS
Accuracy:
   FMA6700: ±1% of FS including linearity [0 to 50°C and 0.35 to 6.8 bar (5 to 100 psia)]
   FMA6600: ±1% of FS at calibration conditions [101 KPa (14.7 psia) and 21.1°C (70°F)]
Pressure Range: 0 to 6.8 bar (100 psig) (measurement)
Pressure Accuracy: ±1% of FS
Temperature Range: 0 to 50°C (measurement)
Temperature Accuracy: ±1°C
Repeatability: ±0.15% of full scale
Response Time: Units up to 10 LPM @1.0 second, units greater than 10 LPM @2 seconds to within ±2% of setpoint over 25% to 100% of full scale
Temp. Coefficient: 0.15% of full scale/°C or better
Pressure Coefficient: 0.01% of full scale/psi (0.07 bar) or better
Max Gas Pressure: 6.8 bar (100 psig)
Max Burst Pressure: 13.6 bar (200 psig)
Max Pressure Drop: 8 psi (at 100 L/min flow)
Gas & Ambient Temp: 5 to 50°C (41 to 122°F)
Output Signals: Linear 0 to 5 Vdc (3000 Ω min load impedance); 0 to 10 Vdc (6000 Ω min impedance); 4 to 20 mA optional (500 . max loop resistance). Maximum noise 20 mV peak to peak.
Input Power: Is available to run at three different voltages: ±15Vdc (±200 mA maximum) or +12Vdc (300 mA maximum) standard; +24Vdc (250 mA maximum) optional (-24VDC); Circuit boards have built-in polarity reversal protection. Resettable fuses provide power input protection.
Materials in Fluid Contact: 316 stainless steel, FKM O-rings. EPDM or Perfluoroelastomer O-rings optional
Connections:
   Models ≥15 LPM: Standard 1/4" compression fittings
   Models 20 to 50 LPM: Standard 1/4" compression fittings
   Models 60 to 100 LPM: Standard 3/8" compression fittings
Display: 128 x 64 graphic LCD with backlight (up to 8 lines of text)
Calibration: Standard one 10 points NIST calibration. Optional up to 9 additional calibrations may be ordered for an additional charge per gas.
CE Compliance: EN 55011 class 1, class B; EN50082-1
Environmental (per IEC 664): Installation Level II; Pollution Degree II
Approximate Shipping Weights:
   Models up to 15 SLPM: 1.68 kg (3.7 lb)
   Models from 20 to 100 LPM: 1.97 kg (4.34 lb)

(Specify Model Number)

Part Number/Desc.

Qty

Description

Flow Meters

FMA6601

Consult Sales

Availability:

Max Flow 10 cc/min 1/4' Compression Fitting

FMA6602

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Availability:

Max Flow 20 cc/min 1/4' Compression Fitting

FMA6603

Consult Sales

Availability:

Max Flow 50 cc/min 1/4' Compression Fitting

FMA6604

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Availability:

Max Flow 100 cc/min 1/4' Compression Fitting

FMA6605

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Availability:

Max Flow 200 cc/min 1/4' Compression Fitting

FMA6606

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Availability:

Max Flow 500 cc/min 1/4' Compression Fitting

FMA6607

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Availability:

Max Flow 1 LPM 1/4' Compression Fitting

FMA6608

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Availability:

Max Flow 2 LPM 1/4' Compression Fitting

FMA6609

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Availability:

Max Flow 5 LPM 1/4' Compression Fitting

FMA6610

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Availability:

Max Flow 10 LPM 1/4' Compression Fitting

FMA6611

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Availability:

Max Flow 15 LPM 1/4' Compression Fitting

FMA6612

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Availability:

Max Flow 20 LPM 1/4' Compression Fitting

FMA6613

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Availability:

Max Flow 30 LPM 1/4' Compression Fitting

FMA6614

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Availability:

Max Flow 40 LPM 1/4' Compression Fitting

FMA6615

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Availability:

Max Flow 50 LPM 1/4' Compression Fitting

FMA6616

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Availability:

Max Flow 60 LPM 3/8' Compression Fitting

FMA6617

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Availability:

Max Flow 80 LPM 3/8' Compression Fitting

FMA6618

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Availability:

Max Flow 100 LPM 3/8' Compression Fitting

Flow Meters with Pressure and Temperature

FMA6701

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Availability:

Max Flow 10 cc/min 1/4' Compression Fitting

FMA6702

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Availability:

Max Flow 20 cc/min 1/4' Compression Fitting

FMA6703

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Availability:

Max Flow 50 cc/min 1/4' Compression Fitting

FMA6704

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Availability:

Max Flow 100 cc/min 1/4' Compression Fitting

FMA6705

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Availability:

Max Flow 200 cc/min 1/4' Compression Fitting

FMA6706

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Availability:

Max Flow 500 cc/min 1/4' Compression Fitting

FMA6707

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Availability:

Max Flow 1 LPM 1/4' Compression Fitting

FMA6708

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Availability:

Max Flow 2 LPM 1/4' Compression Fitting

FMA6709

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Availability:

Max Flow 5 LPM 1/4' Compression Fitting

FMA6710

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Availability:

Max Flow 10 LPM 1/4' Compression Fitting

FMA6711

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Availability:

Max Flow 15 LPM 1/4' Compression Fitting

FMA6712

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Availability:

Max Flow 20 LPM 1/4' Compression Fitting

FMA6713

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Availability:

Max Flow 30 LPM 1/4' Compression Fitting

FMA6714

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Availability:

Max Flow 40 LPM 1/4' Compression Fitting

FMA6715

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Availability:

Max Flow 50 LPM 1/4' Compression Fitting

FMA6716

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Availability:

Max Flow 60 LPM 3/8' Compression Fitting

FMA6717

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Availability:

Max Flow 80 LPM 3/8' Compression Fitting

FMA6718

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Availability:

Max Flow 100 LPM 3/8' Compression Fitting

Accessories

FMA66-PW

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Availability:

115 Vac to ±15 Vdc power supply

FMA66-12PW

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Availability:

115 Vac to 12 Vdc power supply

FMA66-24PW

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Availability:

115 Vac to 24 Vdc power supply

FMA66-230EU

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Availability:

239 Vac to ±15 Vdc power supply

FMA66-12PW-230EU

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Availability:

230 Vac to 12 Vdc power supply

FMA66-24PW-230EU

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Availability:

230 Vac to 24 Vdc power supply

FMA65-C

TWD3,290

Availability: 1 week

Replacement cable, 25-pin D connector with 1.8 m (6') wire branch to power supply

† All prices on this site are shown in Taiwan Dollars.
Note: Comes complete with operator’s manual and NIST traceable certificate for Nitrogen.
Power supply sold separately.

Note: Flow rates are stated for Nitrogen at STP conditions (21.1°C (70°F) at 1 atm).

For 12Vdc power, add suffix "-12VDC" to model number; add $100 to price.

For 24Vdc power, add suffix "-24VDC" to model number; add $200 to price.

For perfloroelastomer, Buna or EPR o-rings, VCR fittings, or RS232 communications, consult Flow Engineering for a quote.

For each additional calibration add -(*) to the part number and $300.00 to the cost.

Calibrations done at ambient temperature only.

For Oxygen cleaned units, add suffix "-C" to the model number; add $125 to price.

(OPTIONS SHOWN IN THIS "NOTE" ABOVE ARE PRICED IN US$)

	(1)	(2)	(3)
FMA

Option Descriptions:

(1) Model Type select from:
66 for Flowmeter
67 for Flow/Pressure/Temperature meter

(2) Range (N₂) select from:
01 for 10 SCCM
02 for 20 SCCM
03 for 50 SCCM
04 for 100 SCCM
05 for 200 SCCM
06 for 500 SCCM
07 for 1 SLM
08 for 2 SLM
09 for 5 SLM
10 for 10 SLM
11 for 15 SLM
12 for 20 SLM
13 for 30 SLM
14 for 40 SLM
15 for 50 SLM
16 for 60 SLM
17 for 80 SLM
18 for 100 SLM

(3) Options select from:
Nothing(leave field blank) for no options (standard unit)
-I for 4 to 20 mA output (replaces std 0 to 5 V)
-12V for 12 Vdc power
-24V for 24 Vdc power
-K for Perfluoroelastomer o-rings
-B for Buna o-rings
-E for EPR o-rings
-VCR for VCR fittings
-RS232 for RS232 communications (replaces std RS485)

Note: All combinations may not be valid, check spec sheet for valid part numbers.